Harbor Semiconductor

Nano-embossed stencil - Line Grid Array
Four-inch nanoimprint stencil for high-resolution pattern transfer at the nanoscale It is widely used in nanoelectronics, optoelectronics, biomedical and photonics applications.
Data Sheet
Nanoimprinting Stencil Product Sheet

Product Details

PeriodicityEffective areaMaximum etching depth (silicon/quartz)Line WidthModel
125nmφ 80 mm 100 nm/80 nm50~80 nmL125_D80
140nmφ 80 mm 100 nm/80 nm50~85 nmL140_D80
150nmφ 90 mm75 nm/80 nm60~100 nmL150_D90
200nmφ 90 mm150 nm/120 nm60~120 nmL200_D90
250nmφ 94 mm200 nm/100 nm90~130 nmL250_D100
280nmφ 80 mm 200 nm/100 nm100~150 nmL280_D80
300nmφ 94 mm300 nm/100 nm100~160 nmL300_D100
380nmφ 94 mm400 nm/300 nm200~270 nmL380_D100
400nmφ 94 mm300 nm/150 nm100~200 nmL400_D100
470nmφ 94 mm500 nm/400 nm200~270 nmL470_D100
500nmφ 94 mm400 nm/200 nm150~250 nmL500_D100
560nmφ 80 mm 400 nm/200 nm150~280 nmL560_D80
600nmφ 94 mm500 nm/250 nm150~300 nmL600_D100
760nmφ 94 mm700 nm/600 nm320~430 nmL760_D100
800nmφ 94 mm600 nm/300 nm200~400 nmL800_D100
1000nmφ 94 mm800 nm/400 nm200~500 nmL1000_D100
1300nm75x55 mm²1000 nm/500 nm300~650 nmL1300_75x55
PeriodicityEffective areaMaximum etching depth (silicon)Line WidthModel
125nm18x18 mm²120 nm60 nmL125_18x18
150nm15x15 mm²150 nm75 nmL150_15x15
200nm20x20 mm²60 nm/90 nm100 nmL200_20x20
300nm30x30 mm²170 nm170 nmL300_30x30
375nm20x20 mm²264 nm240 nmL375_20x20
550nm20x20 mm²300 nm288 nmL550_20x20
600nm20x20 mm²100 nm400 nmL600_20x20
800nm20x20 mm²380 nm400 nmL800_20x20
1300nmφ 50 mm480 nm750 nmL1300_D50
4000nm32x32 mm²2000 nm/2300 nm2000 nmL4000_32x32
4800nm25x25 mm²2600 nm/3200 nm2200 nmL4800_25x25
PeriodicityEffective areaMaximum etching depthLine WidthModel
10μm20x20 mm²5 μm (silicon)400 nmVL10_20x20
80 μmφ 100 mm7.5 μm (Nickel)4 μmVL80_D100

Features and Benefits:

  1. High resolution: Our nanoimprint stencil has excellent resolution capabilities, allowing for complex patterning at the nanoscale. This high-resolution property makes it ideal for studying nanoscale phenomena and fabricating nanodevices.

  2. High precision: Our stencil manufacturing process uses advanced nanofabrication technology to ensure a high degree of consistency and precision. This high precision ensures that each stencil provides reliable and repeatable pattern transfer results.

  3. Versatility: Our nanoimprint stencil can be used for a variety of applications. It can be used to fabricate nanoelectronic devices, such as nanotransistors and nanowires. It can also be used for the fabrication of optoelectronic devices, such as nano gratings and photonic crystals. In addition, it has a wide range of applications in the biomedical field, such as the fabrication of biochips and nanosensors.

  4. Efficient: Our nanoimprint stencil manufacturing process is efficient and scalable. It can be mass-produced for large-scale manufacturing needs. This high efficiency makes our products the first choice for industrial and academic research.

  5. Customization: We can provide customized nano-embossing stencils according to the needs of our customers. Whether it's a specific pattern design or a special material requirement, our team can tailor the best solution for you.

A nanoimprinting template (wire grid array) is a key component used in nanoimprinting technology. It is a template consisting of nanoscale wire grid patterns used to achieve high-resolution pattern transfer on the surface of the target material.

The main feature of nanoimprinted stencils (wire grid arrays) is their wire grid structure. A wire grid is a pattern of long, thin strips arranged in parallel. The spacing and size of these grids can be precisely controlled on the nanoscale, typically between a few tens and a few hundred nanometers. The shape and arrangement of the grids can be designed and customized to meet specific application requirements.

Product accuracy:

Height/Depth: ± 15% Line Width: ± 10%

Diameter: ± 10% Defect area: < 1%

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